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a) Open the Map Analysis program and setup the Element conditions and EOS conditions
as you would normally.
b) Open Stage Conditions >> Position Input.
c) Setup:
Scan type: Stage (uni)
Stage drive: normal
Pixels: whatever you would like.
Pixel size (step size): whatever you would like.
The above two will define the overall map area. The area you will define with the
Freeshape Map routine will be a subset of this overall area.
d) Move the stage to the upper right hand corner of the map area.
e) Click on: Read >> Store > To Start.
f) Click on "Confirm". Focus on the four corner points, and make sure you have
included the entire map area that will be mapped. Otherwise adjust.
g) Go to "Special Map", which is in the upper right corner of the Stage Condition
window. Select "Freeshape Map".
h) In the Freeshape Map window, click on "New".
i) In the "Input New Shape" window, set to "Any Polygon".
j) Move stage to the first point on the edge of the actual area to be mapped. Click on the
"Store" button on the joystick. This will record the point in the "Tops Positions"
window.
k) Move stage around the map area - at each point, click on the "Store" button.
l) When done - close the "Input New Shape" window and the "Tops Position" window.
m) You should now have an outline of the area to be mapped in the "Freeshape Map"
window.
n) Click on "OK" in the "Freeshape Map" window, and the data will be written out to the
Stage Condition window.
o) Click on "Apply" and then "Close" the Stage Condition window.
It is now ready to run. |
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